Frequency dependent fluid damping of micro/nano flexural resonators: Experiment, model and analysis
نویسندگان
چکیده
This research systematically investigates the fluid damping for micromachined beam-type resonators with high resonant frequencies. The work s aimed to find a general fluid damping law which can quantitatively be used as a design tool for the resonance-based micro sensors by accurately redicting the quality factor for resonators operated in air or liquid. Micro-cantilevers with different dimensions are fabricated and tested in order to xtract the damping characteristics. Combined with dimensional analysis, a novel linear fluid damping model is proposed, considering the effects rom both device’s dimension and the resonant frequency. Further by numerical analysis, the model is generalized to resonators with differently haped cross-sections. Also the proposed fluid damping model provides an attractive way to use simple beam-type resonators as fluid viscosity ensors and air pressure sensors. 2006 Elsevier B.V. All rights reserved.
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Determination of Frequency Dependent Fluid Damping of Micro and Nano Resonators for Different Cross-Sections
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